{"id":238,"date":"2019-04-05T09:03:17","date_gmt":"2019-04-05T02:03:17","guid":{"rendered":"https:\/\/materials-lab.hcmus.edu.vn\/?page_id=238"},"modified":"2019-04-05T09:20:13","modified_gmt":"2019-04-05T02:20:13","slug":"sputtering-systems","status":"publish","type":"page","link":"https:\/\/materials-lab.hcmus.edu.vn\/?page_id=238","title":{"rendered":"Sputtering systems"},"content":{"rendered":"\n<p>1. The Univex 450 direct-current (dc) and radio-frequency (rf)\u00a0magnetron\u00a0sputtering system, made in Germany, prepare thin films with few nanometer to micrometer. The minimum based pressure can be evacuated to 1&#215;10<sup>-6<\/sup>\u00a0(Torr) with Turbotronic vacuum pump.<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-256\" src=\"https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/turbotronic.jpg\" alt=\"\" width=\"768\" height=\"1012\" srcset=\"https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/turbotronic.jpg 768w, https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/turbotronic-228x300.jpg 228w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/><\/p>\n<p>UNIVEX 450 system<\/p>\n<p>2. The magnetron sputtering system with oil diffusion vacuum pump use to prepare thin films in lagre scale.<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-258\" src=\"https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/he-magnetron-tu-che-tao.jpg\" alt=\"\" width=\"768\" height=\"888\" srcset=\"https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/he-magnetron-tu-che-tao.jpg 768w, https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/he-magnetron-tu-che-tao-259x300.jpg 259w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter size-full wp-image-257\" src=\"https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/bang-dieu-khien-he-mangetron-tu-che-tao.jpg\" alt=\"\" width=\"1024\" height=\"624\" srcset=\"https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/bang-dieu-khien-he-mangetron-tu-che-tao.jpg 1024w, https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/bang-dieu-khien-he-mangetron-tu-che-tao-300x183.jpg 300w, https:\/\/materials-lab.hcmus.edu.vn\/wp-content\/uploads\/2019\/04\/bang-dieu-khien-he-mangetron-tu-che-tao-768x468.jpg 768w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n","protected":false},"excerpt":{"rendered":"<p>1. The Univex 450 direct-current (dc) and radio-frequency (rf)\u00a0magnetron\u00a0sputtering system, made in Germany, prepare thin films<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":236,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"_links":{"self":[{"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=\/wp\/v2\/pages\/238"}],"collection":[{"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=238"}],"version-history":[{"count":7,"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=\/wp\/v2\/pages\/238\/revisions"}],"predecessor-version":[{"id":263,"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=\/wp\/v2\/pages\/238\/revisions\/263"}],"up":[{"embeddable":true,"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=\/wp\/v2\/pages\/236"}],"wp:attachment":[{"href":"https:\/\/materials-lab.hcmus.edu.vn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=238"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}