Preparing tungsten oxide thin film by RF magnetron sputtering method

Le Van Ngoc, Tran Tuan, Nguyen Van Den, Duong Ai Phuong, Huynh Thanh Dat, Tran Cao Vinh, Cao Thi My Dung

Science and Technology development (VNU-HCM), Vol. 8, Issue 1, pp. 29-33, 2005