Modification of Cl doping efficiency in transparent ZnO electrode films by tuning deposition temperature

Anh Tuan Thanh Pham, Trang Thuy Thi Phan, Vu Huynh Nguyen, Nhi Hoang Phan Vo, Dung Van Hoang, Truong Huu Nguyen, Oanh Kieu Truong Le, Sungkyun Park, Thang Bach Phan, Vinh Cao Tran